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Journal: Proceedings, 2018
Volume: 2
Number: 835
Article:
Vibration Mode Investigation of Piezoelectric Ultrasonic Microsensors on Buckled Diaphragms
Authors:
by
Kaoru Yamashita, Tomoki Nishioka, Minoru Noda and Paul Muralt
Link:
https://www.mdpi.com/2504-3900/2/13/835
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