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Journal: Proceedings, 2018
Volume: 2
Number: 712
Article:
Equivalent Circuit Model of an Optomechanical MEMS Electric Field Strength Sensor
Authors:
by
Andreas Kainz, Wilfried Hortschitz, Harald Steiner, Michael Stifter and Franz Keplinger
Link:
https://www.mdpi.com/2504-3900/2/13/712
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