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Proceeding Paper

SPM—SEM Investigations of Semiconductor Nanowires for Integrated Metal Oxide Gas Sensors †

1
Materials for Microelectronics, Materials Center Leoben Forschung GmbH, 8700 Leoben, Austria
2
Semilab Germany GmbH, 38106 Braunschweig, Germany
*
Author to whom correspondence should be addressed.
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 701; https://doi.org/10.3390/proceedings2130701
Published: 4 December 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
Integration of metal oxide nanowires in metal oxide gas sensors enables a new generation of gas sensor devices, with increased sensitivity and selectivity. For reproducible and stable performance of next generation sensors, the electric properties of integrated nanowires have to be well understood, since the detection principle of metal oxide gas sensors is based on the change in electrical conductivity during gas exposure. We study two different types of nanowires that show promising properties for gas sensor applications with a Scanning Probe Microscope—Scanning Electron Microscope combination. Electron Beam Induced Current and Kelvin Probe Force Microscopy measurements with a lateral resolution in the nanometer regime are performed. Our work offers new insights into the dependence of the nanowire work function on its composition and size, and into the local interaction between electron beam and semiconductor nanowires.
Keywords: metal oxide nanowire; scanning probe microscope—scanning electron microscope combination; kelvin probe force microscopy; electron beam induced current metal oxide nanowire; scanning probe microscope—scanning electron microscope combination; kelvin probe force microscopy; electron beam induced current
MDPI and ACS Style

Leitgeb, V.; Fladischer, K.; Hitzel, F.; Sosada-Ludwikowska, F.; Krainer, J.; Wimmer-Teubenbacher, R.; Köck, A. SPM—SEM Investigations of Semiconductor Nanowires for Integrated Metal Oxide Gas Sensors. Proceedings 2018, 2, 701. https://doi.org/10.3390/proceedings2130701

AMA Style

Leitgeb V, Fladischer K, Hitzel F, Sosada-Ludwikowska F, Krainer J, Wimmer-Teubenbacher R, Köck A. SPM—SEM Investigations of Semiconductor Nanowires for Integrated Metal Oxide Gas Sensors. Proceedings. 2018; 2(13):701. https://doi.org/10.3390/proceedings2130701

Chicago/Turabian Style

Leitgeb, Verena, Katrin Fladischer, Frank Hitzel, Florentyna Sosada-Ludwikowska, Johanna Krainer, Robert Wimmer-Teubenbacher, and Anton Köck. 2018. "SPM—SEM Investigations of Semiconductor Nanowires for Integrated Metal Oxide Gas Sensors" Proceedings 2, no. 13: 701. https://doi.org/10.3390/proceedings2130701

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