Next Article in Journal
Design and Optimization of a Low-Resonant-Frequency Piezoelectric MEMS Energy Harvester Based on Artificial Intelligence
Previous Article in Journal
Estimation of the Size of the Battery for Hybrid Electric Trolley Busses Using Backward Quasi-Static Modelling
Open AccessProceedings

Novel Design of an Extremely Miniaturized Accelerometer Based on Quantum Tunneling Effect

Chair Microsystems, University of Stuttgart, Pfaffenwaldring 4F, 70569 Stuttgart, Germany
*
Author to whom correspondence should be addressed.
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 1045; https://doi.org/10.3390/proceedings2131045
Published: 26 November 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
This paper presents the design of an extremely miniaturized accelerometer based on the tunneling effect. Because of its high sensitivity the tunneling effect allows the detection of smallest deflections. The aim of the novel design is a large geometric miniaturization at the lowest possible natural frequency with a nominal acceleration of +/−1 g corresponding to a deflection of +/−9.36 Å. The poly-silicon (PolySi) sensor structure with a size (L × W) of 98 µm × 85 µm is designed in a way that the main displacement operates just in one direction. To lead the sensor into operational conditions, control a constant distance between the tunneling electrodes and perform self-test actuations two electrodes are placed below the sensor structure. The tunneling tip is deposited by a focused ion beam (FIB) to provide the tunneling section with a third pad on the substrate. Within this paper the focus is on the functional implementation of the structure, the investigation of the electrostatic actuators and the deposition of the tunneling tip by the FIB.
Keywords: accelerometer; tunneling effect; microsensors; electrostatic; focused ion beam accelerometer; tunneling effect; microsensors; electrostatic; focused ion beam
MDPI and ACS Style

Haub, M.; Hummel, S.; Bogner, M.; Sandmaier, H. Novel Design of an Extremely Miniaturized Accelerometer Based on Quantum Tunneling Effect. Proceedings 2018, 2, 1045.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop