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Proceedings 2018, 2(13), 1028; https://doi.org/10.3390/proceedings2131028

Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator

1
CMEMS-UM, University of Minho, 4800-058 Guimarães, Portugal
2
MeN, International and Iberian Nanotechnology Laboratory (INL), 4717-330 Braga, Portugal
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
*
Author to whom correspondence should be addressed.
Published: 9 November 2018
PDF [800 KB, uploaded 9 November 2018]

Abstract

A Lorentz force MEMS magnetometer based on a double-ended tuning fork (DETF) for out-of-plane sensing is presented here. A novel configuration using a hexagonal-shaped Lorentz force transducer is used, which simplifies the sensor configuration and improves its sensitivity. Frequency modulated devices were fabricated in an in-house process on silicon on insulator wafers (SOI) and then tested in vacuum. The final devices have a differential configuration and experimental characterization shows a sensitivity of 4.59 Hz/mT for a total input current (on the Lorentz bar) of 1.5 mA.
Keywords: MEMS; magnetometer; frequency modulated; Lorentz force MEMS; magnetometer; frequency modulated; Lorentz force
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Moreira, E.E.; Gaspar, J.; Rocha, L.A. Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator. Proceedings 2018, 2, 1028.

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