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Proceedings 2018, 2(13), 1023;

Monolithically Integrated, CMOS-Compatible SiN Photonics for Sensing Applications

ams AG, 8141 Premstaetten, Austria
AIT Austrian Institute of Technology GmbH, 1210 Vienna, Austria
Research Centre for Microtechnology, Vorarlberg University of Applied Sciences, 6850 Dornbirn, Austria
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Author to whom correspondence should be addressed.
Published: 19 November 2018
PDF [762 KB, uploaded 19 November 2018]


As a leading provider of sensing solutions ams AG is developing semiconductor sensors in a wide variety of fields. One of the key competences of ams AG lies in optical sensing. To widen the company’s portfolio in this field we have been developing processes for fully integrated CMOS compatible photonic components based on Si3N4 in the last few years. This contribution will give an overview of the Si3N4 process as a post-processing flow for standard CMOS, some basic photonic building blocks and their properties, and an example for their use in the field of medical applications.
Keywords: optical waveguides; Si3N4 waveguides; photonics; OCT; AWG optical waveguides; Si3N4 waveguides; photonics; OCT; AWG
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Sagmeister, M.; Koppitsch, G.; Muellner, P.; Nevlacsil, S.; MaeseNovo, A.; Hainberger, R.; Seyringer, D.; Kraft, J. Monolithically Integrated, CMOS-Compatible SiN Photonics for Sensing Applications. Proceedings 2018, 2, 1023.

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