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A Robust 3D- and Inkjet-Printed Capacitive Position Sensor for a Spectrometer Application

Institute for Smart System Technologies, Sensors and Actuators Department, Alpen-Adria-Universität Klagenfurt, 9020 Klagenfurt, Austria
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Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 1082; https://doi.org/10.3390/proceedings2131082
Published: 19 November 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
For the considered application of a Fourier Transform InfraRed (FTIR) spectrometer, a functional package and an inkjet-printed capacitive position sensor are built. The package is made of 3D-printed copper. The copper is then coated with insulator onto which inkjet-printed silver electrodes are subsequently applied. The whole structure builds up a capacitive position sensor. The target application is to measure the position of an electrostatically actuated Micro Electro Mechanical System (MEMS) mirror with nanometer accuracy at high bandwidths and large position offset. The MEMS mirror is part of a Michelson interferometer setup and driven at resonance. The large oscillation amplitude and high required resolution at resonance of the MEMS mirror are also the reason for high demands on the position measurement. Robustness against disturbing frequencies is assured by employment of a carrier-frequency read-out structure.
Keywords: capacitive sensor; nanometer position measurement; inkjet-printing; 3D-printed metals; additive manufacturing capacitive sensor; nanometer position measurement; inkjet-printing; 3D-printed metals; additive manufacturing
MDPI and ACS Style

Faller, L.-M.; Zangl, H. A Robust 3D- and Inkjet-Printed Capacitive Position Sensor for a Spectrometer Application. Proceedings 2018, 2, 1082.

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