Next Article in Journal
Sensitivity of Piezoelectric Ultrasonic Microsensors with Sol-Gel Derived PZT Films Prepared through Various Pyrolysis Temperatures
Previous Article in Journal
Ozone Sensors Working at Room Temperature Using Zinc Oxide Nanocrystals Annealed at Low Temperature
 
 
Search for Articles:
Title / Keyword
Author / Affiliation / Email
Journal
Article Type
 
 
Advanced Search
 
Section
Special Issue
Volume
Issue
Number
Page
 
Journals
Proceedings
Volume 1
Issue 4
10.3390/proceedings1040584
proceedings-logo
Submit to this Journal
► Article Menu

Article Menu

share Share announcement Help format_quote Cite question_answer Discuss in SciProfiles
first_page
settings
Order Article Reprints
Font Type:
Arial Georgia Verdana
Font Size:
Aa Aa Aa
Line Spacing:
Column Width:
Background:
Proceeding Paper

Bulk PZT Cantilever Based MEMS Acoustic Transducer for Cochlear Implant Applications †

by
Aziz Koyuncuoğlu
1,2,
Bedirhan İlik
1,3,
Salar Chamanian
1,3,
Hasan Uluşan
1,3,
Parinaz Ashrafi
1,
Dilek Işık
1 and
Haluk Külah
1,2,3,*
1
METU-MEMS Research and Application Center, Middle East Technical University, Ankara, Turkey
2
Micro Nano Technology Graduate Program, Middle East Technical University, Ankara, Turkey
3
Department of Electrical and Electronics Engineering, Middle East Technical University, Ankara, Turkey
*
Author to whom correspondence should be addressed.
†
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Proceedings 2017, 1(4), 584; https://doi.org/10.3390/proceedings1040584
Published: 11 August 2017
(This article belongs to the Proceedings of Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017)
Browse Figures
Versions Notes

Abstract

This paper presents the first acoustic experimental results of a MEMS based bulk piezoelectric transducer for use in fully implantable cochlear implants (FICI). For this purpose, the transducer was attached onto an acoustically vibrating membrane. Sensing and energy harvesting performances were measured using neural stimulation and rectifier circuits, respectively. The chip has a 150 Hz bandwidth around 1800 Hz resonance frequency that is suitable for mechanical filtering as a sensor. As an energy harvester, bulk piezoelectric transducer generated a rectified power of 16.25 μW with 2.47 VDC with 120 dB-A sound input at 1780 Hz. Among other MEMS acoustic energy harvesters in the literature, reported transducer has the highest power density (1.5 × 10−3 W/cm3) to our knowledge.
Keywords: energy harvesting; bulk PZT; acoustic energy harvesting; cochlear implants energy harvesting; bulk PZT; acoustic energy harvesting; cochlear implants

Share and Cite

MDPI and ACS Style

Koyuncuoğlu, A.; İlik, B.; Chamanian, S.; Uluşan, H.; Ashrafi, P.; Işık, D.; Külah, H. Bulk PZT Cantilever Based MEMS Acoustic Transducer for Cochlear Implant Applications. Proceedings 2017, 1, 584. https://doi.org/10.3390/proceedings1040584

AMA Style

Koyuncuoğlu A, İlik B, Chamanian S, Uluşan H, Ashrafi P, Işık D, Külah H. Bulk PZT Cantilever Based MEMS Acoustic Transducer for Cochlear Implant Applications. Proceedings. 2017; 1(4):584. https://doi.org/10.3390/proceedings1040584

Chicago/Turabian Style

Koyuncuoğlu, Aziz, Bedirhan İlik, Salar Chamanian, Hasan Uluşan, Parinaz Ashrafi, Dilek Işık, and Haluk Külah. 2017. "Bulk PZT Cantilever Based MEMS Acoustic Transducer for Cochlear Implant Applications" Proceedings 1, no. 4: 584. https://doi.org/10.3390/proceedings1040584

APA Style

Koyuncuoğlu, A., İlik, B., Chamanian, S., Uluşan, H., Ashrafi, P., Işık, D., & Külah, H. (2017). Bulk PZT Cantilever Based MEMS Acoustic Transducer for Cochlear Implant Applications. Proceedings, 1(4), 584. https://doi.org/10.3390/proceedings1040584

Article Metrics

Back to TopTop