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Proceedings 2017, 1(4), 564;

A Laser-Machined Stainless-Steel Micro-Scanner for Confocal Microscopy

Department of Electrical & Electronics Eng. Bebek, Bogazici University, 34342 Istanbul, Turkey
Department of Electrical & Electronics Eng. Eyup, Istanbul Bilgi University, 34060 Istanbul, Turkey
Department of Electronics & Communication Eng. Maslak, Istanbul Technical University, 34469 Istanbul, Turkey
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 7 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [1080 KB, uploaded 4 September 2017]


A stainless-steel based micro-scanner with magnetic actuation is fabricated via laser-cutting technology targeted for confocal microscopy. Laser cutting offers low-cost and high speed fabrication of such scanners. The device is designed to establish a 2D Lissajous pattern. For a coil drive of 180 mA, fabricated scanner is able to deliver 4 degrees of optical scan angle for both slow scan and fast scan axes at 663 Hz and 2211 Hz, respectively. Fabricated mirror is integrated into a confocal microscopy setup and tested with the United States Air Force target accomplishing a 200 μm × 200 μm field of view and sub 10 μm resolution. With further improvement, our scanner will contribute to manufacturing of low-cost and compact scanning microscopy technologies.
Keywords: laser-machined; confocal microscopy; micro-scanner; magnetic actuation laser-machined; confocal microscopy; micro-scanner; magnetic actuation
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Oyman, H.A.; Icel, M.A.; Efe, B.C.; Gokdel, Y.D.; Ferhanoglu, O.; Yalcinkaya, A.D. A Laser-Machined Stainless-Steel Micro-Scanner for Confocal Microscopy. Proceedings 2017, 1, 564.

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