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Proceedings 2017, 1(4), 562;

Evanescent Waveguide Sensor for On-Chip Biomolecular Detection

Department of Information Engineering, Electronics and Telecommunications, Sapienza University of Rome, Rome, Italy
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 30 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [450 KB, uploaded 30 August 2017]


This work presents analysis and development of an evanescent waveguide sensor system, which integrates an amorphous silicon photodiode and a glass-diffused waveguide. Design of the system includes a study of thickness and refractive index of the transparent electrode of the diode, which are crucial parameters for the optimization of the optical coupling between the waveguide and the photodetector. Preliminary electro-optical measurements on the fabricated device show excellent system performances, and suggest its use for on-chip detection in lab-on-chip applications.
Keywords: lab-on-chip; optical waveguides; amorphous silicon; evanescent waveguide sensor; ITO lab-on-chip; optical waveguides; amorphous silicon; evanescent waveguide sensor; ITO
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Cesare, G.; Asquini, R.; Buzzin, A.; Caputo, D. Evanescent Waveguide Sensor for On-Chip Biomolecular Detection. Proceedings 2017, 1, 562.

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