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Proceedings 2017, 1(4), 402;

Plasma Oxidized W-WOx Sensor for Sub-ppm H2S Detection

Centre for Nano Science and Engineering, Indian Institute of Science, Bangalore, India
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 29 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [334 KB, uploaded 29 August 2017]


In this work we have fabricated W-WOx core-shell nanowire structure using plasma oxidation, a CMOS compatible process, for sensing H2S gas. For comparison, the sputtered stack structure of W-WOx with different thickness ratios of W to WOx is fabricated and characterized for H2S sensing. The sensor fabricated using plasma oxidation process is found to be significantly better in sensing performance compared to the sensing results obtained from sensor fabricated using sputtering. The response of plasma oxidized sensor is 90.4% for 1 ppm H2S with response and recovery time of 4 s and 46 s respectively. In contrast, the sensor fabricated with sputtered film shows a response of 30.6% at 1 ppm with response and recovery times of 19 s and 84 s respectively. This study clearly indicates that plasma oxidation is an efficient method for development of stable sensors.
Keywords: plasma oxidation; core-shell nanowire; RF sputtering plasma oxidation; core-shell nanowire; RF sputtering
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Benedict, S.; Bhat, N. Plasma Oxidized W-WOx Sensor for Sub-ppm H2S Detection. Proceedings 2017, 1, 402.

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