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Proceedings 2017, 1(4), 365;

Mechanical Characterization of (La,Sr)MnO3 Microbridges for Thermometric Applications

Physics Department, University of Genova, 16146 Genova, Italy
Consiglio Nazionale Delle Ricerche-Istituto SPIN, 16152 Genova, Italy
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 28 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [875 KB, uploaded 28 August 2017]


MicroElectroMechanical Systems (MEMS) made of heterostructures of crystalline oxide materials with targeted physical properties may be applied as sensors having different integrated functionalities. In this work, we explore the feasibility of manganite thin film based epitaxial MEMS for thermometric micromechanical sensing. We investigate the mechanical properties of La1−xSrxMnO3, with x ≈ 1/3, freestanding microbridges as a function of temperature for applications in the field of micromechanical temperature sensors.
Keywords: uncooled bolometers; microbridges; micropirani uncooled bolometers; microbridges; micropirani
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Remaggi, F.; Pellegrino, L.; Manca, N.; Bernini, C.; Marré, D. Mechanical Characterization of (La,Sr)MnO3 Microbridges for Thermometric Applications. Proceedings 2017, 1, 365.

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