MEMS Sensors Based on Very Thin LTCC†
AbstractThe application of thin LTCC is a very interesting and promising approach to the fabrication of ceramic MEMS gas sensors. The attempts to use this material were restricted till now by the thickness of commercial material (>50 μm). In this work, we found a possibility to fabricate thin LTCC membranes (20–30 μm) stretched on a frame made of 100 μm thick LTCC. Aerosol jet printed Pt microheater and laser cutting of the membrane gave a cantilever shaped microhotplate with hot spot of about 300 × 300 μm. Power consumption of the heater is ~150 mW at 450 °C.
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Vasiliev, A.A.; Nisan, A.V.; Potapov, G.N.; Samotaev, N.N.; Oblov, K.Y.; Ivanova, A.V. MEMS Sensors Based on Very Thin LTCC. Proceedings 2017, 1, 324.
Vasiliev AA, Nisan AV, Potapov GN, Samotaev NN, Oblov KY, Ivanova AV. MEMS Sensors Based on Very Thin LTCC. Proceedings. 2017; 1(4):324.Chicago/Turabian Style
Vasiliev, Alexey A.; Nisan, Anton V.; Potapov, Gleb N.; Samotaev, Nikolay N.; Oblov, Konstantin Yu.; Ivanova, Anastasia V. 2017. "MEMS Sensors Based on Very Thin LTCC." Proceedings 1, no. 4: 324.