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Journal: Proceedings, 2017
Volume: 1
Number: 309
Article:
Nanofabrication of Vertically Aligned 3D GaN Nanowire Arrays with Sub-50 nm Feature Sizes Using Nanosphere Lift-off Lithography
Authors:
by
Tony Granz, Shinta Mariana, Gerry Hamdana, Feng Yu, Muhammad Fahlesa Fatahilah, Irene Manglano Clavero, Prabowo Puranto, Zhi Li, Uwe Brand, Joan Daniel Prades, Erwin Peiner, Andreas Waag and Hutomo Suryo Wasisto
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https://www.mdpi.com/2504-3900/1/4/309
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