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Proceedings 2017, 1(4), 397;

ZnO Nanostructure Based QCM Sensor to Detect Ethanol at Room Temperature Fabricated by All Wet Process

Faculty of Engineering Science, Kansai University, Osaka, Japan
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 8 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [494 KB, uploaded 6 September 2017]


QCM is one of major sensing methods for volatile organic compounds (VOC) at room temperature. Nanostructure is effective to increase the sensitivity because of its large surface area. We introduced ZnO nanostructure to detect ethanol gas. ZnO nanostructure was fabricated by all wet process such as electrodeposition and chemical bath deposition (CBD). In this case, seed layer was obtained by electrodeposition, and nanostructure was formed by the CBD. The thickness of seed layer was controllable by charge amount on the electrodeposition, and that of nanostructure was controllable by deposition time on the CBD. As the results, the sensitivity increased with the thickness of the seed layer when the deposition time on CBD was set as 30 min. These results indicate that we can obtain high sensitive VOC sensor by using all wet process which is fit to large scale production with cost-effective.
Keywords: QCM; nanostructure; gas sensing QCM; nanostructure; gas sensing
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Ito, T.; Yamanishi, N.; Shimizu, T.; Shingubara, S. ZnO Nanostructure Based QCM Sensor to Detect Ethanol at Room Temperature Fabricated by All Wet Process. Proceedings 2017, 1, 397.

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