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Journal: Proceedings, 2017
Volume: 1
Number: 291

Article: Single-Step CMOS Compatible Fabrication of High Aspect Ratio Microchannels Embedded in Silicon
Authors: by Marta Kluba, Aslihan Arslan, Ronald Stoute, James Muganda and Ronald Dekker
Link: https://www.mdpi.com/2504-3900/1/4/291

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