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Proceedings 2017, 1(4), 281;

Modelling Cross Axis Sensitivity in MEMS Coriolis Vibratory Gyroscopes

STMicroelectronics, AMG R&D, 1228 Geneva, Switzerland
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 17 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [626 KB, uploaded 17 August 2017]


In this paper a Cross Axis evaluation methodology is presented. The Cross Axis Sensitivity value depends on backend testing position tolerances as well as technological features and design properties of the MEMS gyroscope. A numerical model was developed to take into account the sources of cross axis related to the last two contributions, not considering backend tolerances. Given a specific structure for the AM gyroscope, the asymmetries in the MEMS structure are acknowledged as the main sources for the cross axis. The results of the harmonic FEM simulations were finally compared with real testing data, thus proving the validity of the developed FEM model.
Keywords: MEMS; AM gyroscope; cross-axis sensitivity; FEM model MEMS; AM gyroscope; cross-axis sensitivity; FEM model
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Guerinoni, L.; Falorni, L.G.; Gattere, G. Modelling Cross Axis Sensitivity in MEMS Coriolis Vibratory Gyroscopes. Proceedings 2017, 1, 281.

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