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Structural Evolution of MoO3 Thin Films Deposited on Copper Substrates upon Annealing: An X-ray Absorption Spectroscopy Study

Department of Physics, Università di Roma Tor Vergata, via della Ricerca Scientifica 1, 00133 Rome, Italy
Istituto Nazionale Fisica Nucleare, Laboratori Nazionali di Frascati, via Enrico Fermi 40, 00044 Frascati, Italy
Diamond Light Source, Harwell Science and Innovation Campus, Didcot OX11 0DE, UK
Istituto Nazionale Fisica Nucleare, Sezione di Milano, Via Celoria 16, 20133 Milano, Italy
Rome International Centre for Material Science Superstripes, RICMASS, via dei Sabelli 119A, 00185 Rome, Italy
Author to whom correspondence should be addressed.
Condens. Matter 2019, 4(2), 41;
Received: 14 March 2019 / Revised: 13 April 2019 / Accepted: 15 April 2019 / Published: 18 April 2019
(This article belongs to the Special Issue High Precision X-Ray Measurements)
Structural changes of MoO3 thin films deposited on thick copper substrates upon annealing at different temperatures were investigated via ex situ X-Ray Absorption Spectroscopy (XAS). From the analysis of the X-ray Absorption Near-Edge Structure (XANES) pre-edge and Extended X-ray Absorption Fine Structure (EXAFS), we show the dynamics of the structural order and of the valence state. As-deposited films were mainly disordered, and ordering phenomena did not occur for annealing temperatures up to 300 °C. At ~350 °C, a dominant α-MoO3 crystalline phase started to emerge, and XAS spectra ruled out the formation of a molybdenum dioxide phase. A further increase of the annealing temperature to ~500 °C resulted in a complex phase transformation with a concurrent reduction of Mo6+ ions to Mo4+. These original results suggest the possibility of using MoO3 as a hard, protective, transparent, and conductive material in different technologies, such as accelerating copper-based devices, to reduce damage at high gradients. View Full-Text
Keywords: molybdenum; TM oxides; XAFS; thin films molybdenum; TM oxides; XAFS; thin films
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Macis, S.; Rezvani, J.; Davoli, I.; Cibin, G.; Spataro, B.; Scifo, J.; Faillace, L.; Marcelli, A. Structural Evolution of MoO3 Thin Films Deposited on Copper Substrates upon Annealing: An X-ray Absorption Spectroscopy Study. Condens. Matter 2019, 4, 41.

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