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Journal: Condensed MatterVolume: 10Number: 19
Article: Kinetics of Thickness Growth of Silicon Films During Pulsed Magnetron Sputtering Using the Caroline D12C System
  • Authors:
  • Kanat Tolubayev*,
  • Bakhyt Zhautikov and
  • Saule Kabiyeva
  • et al.
Link: https://www.mdpi.com/2410-3896/10/1/19

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