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Journal: Condens. Matter, 2025
Volume: 10
Number: 19
Article:
Kinetics of Thickness Growth of Silicon Films During Pulsed Magnetron Sputtering Using the Caroline D12C System
Authors:
by
Kanat Tolubayev, Bakhyt Zhautikov, Nikolay Zobnin, Guldana Dairbekova and Saule Kabiyeva
Link:
https://www.mdpi.com/2410-3896/10/1/19
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