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Journal: C, 2019
Volume: 5
Number: 8

Article: Effects of Ion Bombardment Energy Flux on Chemical Compositions and Structures of Hydrogenated Amorphous Carbon Films Grown by a Radical-Injection Plasma-Enhanced Chemical Vapor Deposition
Authors: by Hirotsugu Sugiura, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa and Masaru Hori
Link: https://www.mdpi.com/2311-5629/5/1/8

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