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Journal: Inorganics, 2024
Volume: 12
Number: 264

Article: Recent Advances in Aluminum Nitride (AlN) Growth by Magnetron Sputtering Techniques and Its Applications
Authors: by Nabeel Ahmad Khan Jadoon, Vaigunthan Puvanenthiram, Mayada Ahmed Hassan Mosa, Ashutosh Sharma and Kaiying Wang
Link: https://www.mdpi.com/2304-6740/12/10/264

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