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Journal: Photonics, 2022
Volume: 9
Number: 830

Article: Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements
Authors: by Di Chang, Ziqi Yin, Yunke Sun, Pengcheng Hu, Jiubin Tan and Zhigang Fan
Link: https://www.mdpi.com/2304-6732/9/11/830

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