Miniaturized Interferometric Sensors with Spectral Tunability for Optical Fiber Technology—A Comparison of Size Requirements, Performance, and New Concepts
Abstract
:1. Introduction
2. Methodology of Static FP Sensor Arrays
2.1. Microspectrometers
2.2. Nanospectrometers
3. Static FP Filter Array Fabrication in the VIS Spectral Range Demonstrating a Single Nanoimprint over 3 DBR Stacks of Different Height
3.1. DBR Mirrors: Materials and Geometrical Issues
3.2. Definition of 3D Nanoimprint Templates Using Digital Etching and Digital Deposition
3.3. Combining Three DBR Stopbands in the Fabrication Process of an FP Filter Array
3.4. The Complete Array: Lateral Arrangement of the FP Filters
4. Experimental Results of Static FP Filter Arrays in the VIS Range
4.1. Transmission Spectra of Static FP Filter Arrays
4.2. Interpretation of Experimental Results Concerning Linewidths
5. Static FP Sensor Array in a Fiber Technology System
6. Laboratory Demonstration of Efficiency Boosting by Spectral Preselection
7. Static FP Filter Arrays for the NIR: Fabrication and Characterization
8. MEMS Tunable FP Filters with a Single Air-Gap for the VIS and NIR Spectral Range
9. MEMS Tunable FP Filter Sensors in the NIR Range with Multiple Air-Gaps: Methodology, Simulations, Fabrication and Characterization
10. Limits of Semiconductor and Dielectric Material Systems for MEMS-Based Sensorics: Geometry, FWHM, Tuning and Stopband Width
11. Further Concepts for Miniaturization Based on Plasmonics, Ring Resonators, Quantum Dots, Spatial Heterodyning, and Photonic Crystals on Fiber Tips and in MEMS Membranes
11.1. Sensors Based on Photonic Crystals in MEMS Membranes
11.2. Nano-Optical Sensor Concepts
11.3. Sensors with Links to Telecom Devices
11.4. Sensors with Computational Signal Evaluation
11.5. Sensors on the Fiber Tip
11.6. Spatial Heterodyne Sensors
12. Estimation of Potential Space Requirement after Utmost Miniaturization
12.1. Static FP Filter Arrays Covering 400 nm in the VIS Spectral Range
12.2. Static FP Filter Arrays Covering 500 nm in the NIR Spectral Range
12.3. MEMS Tunable FP Filter Arrays Covering 500 nm in the NIR Spectral Range
12.4. MEMS Tunable FP Filter Arrays Covering 400 nm in the VIS Spectral Range
12.5. MEMS Tunable PC Filter to Cover a Spectral Span of 500 nm in the NIR Range
12.6. AWG Covering 500 nm in the NIR Spectral Range
12.7. Plasmonic MEMS Cantilever Covering 500 nm in the NIR Spectral Range
12.8. Locally Heated Chirped FBG to Cover a Spectral Span of 500 nm in the NIR Spectral Range
13. Where Are the Minimum Structure Size Limits in 3D Nanoimprint Lithography?
14. Can Nanoimprint Be Applied to Fabricate the Seven Sensor Types Compared Here?
15. Conclusions
16. Patents
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
Abbreviations
1D | one-dimensional |
2D | two-dimensional |
3D | three-dimensional |
αInP | absorption coefficient of InP |
αSi3N4 | absorption coefficient of silicon nitride |
αSiO2 | absorption coefficient of silicon dioxide |
AWG | arrayed waveguide grating |
CCD | charge coupled device |
CMOS | complementary metal oxide semiconductor |
Δλ | wavelength tuning range, wavelength interval, wavelength difference |
Δλi | wavelength interval, wavelength spacing |
Δλ/λ | optical resolution of an optical sensor or spectrometer |
Δl | interface fluctuations |
ΔL | displacement of DBR mirrors, cavity tuning |
ΔL1, ΔL2 | cavity lengths fluctuations |
Δλ/ΔL | tuning efficiency |
Δn | refractive index difference |
DBR | distributed Bragg reflector |
DWDM | dense wavelength division multiplex |
FBG | fiber Bragg grating |
FIB | focused ion beam |
FP | Fabry-Pérot |
FWHM | full width at half maximum, linewidth |
GMR | guided mode resonance |
L, L1, L2 | cavity thickness, cavity height, cavity length |
λ | vacuum wavelength |
λair | wavelength of light in air |
λi | central wavelength of DBR number i |
λi/4 | quarter-wavelength optical thickness of a single DBR material layer of index i |
effective wavelength | |
λInP | wavelength of light in InP |
Λ | periodicity of interference pattern |
LIGA | Lithographie, Galvanik, Abformung = lithography, electroplating, molding |
LPP | localized plasmon polariton |
M | number of waveguides in an AWG |
MEMS | micro-electro-mechanical-system |
MOCVD | metal-organic chemical vapor deposition |
n | refractive index |
nInP | refractive index of indium phosphide |
nSi3N4 | refractive index of silicon nitride |
nSiO2 | refractive index of silicon dioxide |
N | number of grating lines, or number of different FP filter arrays |
NIR | near-infrared |
QD | quantum dot |
p | number of periods in the DBR |
PC | photonic crystal |
PCF | photonic crystal fiber |
PD | photodiode |
PD1, PD2 | highly doped semiconductor layers in a photodiode |
PDMS | polydimethylsiloxane |
PECVD | plasma enhanced chemical vapor deposition |
Rmax | Maximum reflectance in the center of the stopband |
Rmax,sat | Saturation value of the maximum reflectance in the center of the stopband |
SCIL | substrate conformal imprint lithography |
SEM | scanning electron microscope |
SERS | surface enhanced Raman spectroscopy |
SHS | spatial heterodyne spectroscopy |
SOI | silicon on insulator |
SPP | surface plasmon polariton |
Θ | half angle between intersecting wavevectors |
VIS | visible (spectral range) |
UV | ultraviolet |
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Hillmer, H.; Woidt, C.; Kobylinskiy, A.; Kraus, M.; Istock, A.; Iskhandar, M.S.Q.; Brunner, R.; Kusserow, T. Miniaturized Interferometric Sensors with Spectral Tunability for Optical Fiber Technology—A Comparison of Size Requirements, Performance, and New Concepts. Photonics 2021, 8, 332. https://doi.org/10.3390/photonics8080332
Hillmer H, Woidt C, Kobylinskiy A, Kraus M, Istock A, Iskhandar MSQ, Brunner R, Kusserow T. Miniaturized Interferometric Sensors with Spectral Tunability for Optical Fiber Technology—A Comparison of Size Requirements, Performance, and New Concepts. Photonics. 2021; 8(8):332. https://doi.org/10.3390/photonics8080332
Chicago/Turabian StyleHillmer, Hartmut, Carsten Woidt, Aliaksei Kobylinskiy, Matthias Kraus, André Istock, Mustaqim S. Q. Iskhandar, Robert Brunner, and Thomas Kusserow. 2021. "Miniaturized Interferometric Sensors with Spectral Tunability for Optical Fiber Technology—A Comparison of Size Requirements, Performance, and New Concepts" Photonics 8, no. 8: 332. https://doi.org/10.3390/photonics8080332