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Journal: Photonics, 2025
Volume: 12
Number: 900
Article:
Ptycho-LDM: A Hybrid Framework for Efficient Phase Retrieval of EUV Photomasks Using Conditional Latent Diffusion Models
Authors:
by
Suman Saha, Paolo Ansuinelli, Luis Barba, Iacopo Mochi and BenjamÃn Béjar Haro
Link:
https://www.mdpi.com/2304-6732/12/9/900
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