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Journal: Photonics, 2024
Volume: 11
Number: 479

Article: Experimental Study on Evolution of Chemical Structure Defects and Secondary Contaminative Deposition during HF-Based Etching
Authors: by Xiao Shen, Feng Shi, Shuo Qiao, Xing Peng and Ying Xiong
Link: https://www.mdpi.com/2304-6732/11/5/479

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