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Journal: Photonics, 2024
Volume: 11
Number: 341
341
Article: Quantitative Evaluation of the Batwing Effect on Depth Measurement in Coherence Scanning Interferometry for Rectangular Gratings
Authors: by Jiale Zhang, Qun Yuan, Xiaoxin Fan, Lu Chen, Lihua Lei, Yunxia Fu, Zhiyi Xu, Jianqiu Ma and Zhishan Gao
Link: https://www.mdpi.com/2304-6732/11/4/341

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