Zhang, J.; Yuan, Q.; Fan, X.; Chen, L.; Lei, L.; Fu, Y.; Xu, Z.; Ma, J.; Gao, Z.
Quantitative Evaluation of the Batwing Effect on Depth Measurement in Coherence Scanning Interferometry for Rectangular Gratings. Photonics 2024, 11, 341.
https://doi.org/10.3390/photonics11040341
AMA Style
Zhang J, Yuan Q, Fan X, Chen L, Lei L, Fu Y, Xu Z, Ma J, Gao Z.
Quantitative Evaluation of the Batwing Effect on Depth Measurement in Coherence Scanning Interferometry for Rectangular Gratings. Photonics. 2024; 11(4):341.
https://doi.org/10.3390/photonics11040341
Chicago/Turabian Style
Zhang, Jiale, Qun Yuan, Xiaoxin Fan, Lu Chen, Lihua Lei, Yunxia Fu, Zhiyi Xu, Jianqiu Ma, and Zhishan Gao.
2024. "Quantitative Evaluation of the Batwing Effect on Depth Measurement in Coherence Scanning Interferometry for Rectangular Gratings" Photonics 11, no. 4: 341.
https://doi.org/10.3390/photonics11040341
APA Style
Zhang, J., Yuan, Q., Fan, X., Chen, L., Lei, L., Fu, Y., Xu, Z., Ma, J., & Gao, Z.
(2024). Quantitative Evaluation of the Batwing Effect on Depth Measurement in Coherence Scanning Interferometry for Rectangular Gratings. Photonics, 11(4), 341.
https://doi.org/10.3390/photonics11040341