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Journal: Processes, 2024
Volume: 12
Number: 1858
1858
Article: Preliminary Exploration of Low Frequency Low-Pressure Capacitively Coupled Ar-O₂ Plasma
Authors: by Niaz Wali, Weiwen Xiao, Qayam Ud Din, Najeeb Ur Rehman, Chiyu Wang, Jiatong Ma, Wenjie Zhong and Qiwei Yang
Link: https://www.mdpi.com/2227-9717/12/9/1858

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