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Journal: Processes, 2022
Volume: 10
Number: 492
Article:
Automated Instrument for the Deposition of Thin Films Using Successive Ionic Layer Adsorption and Reaction
Authors:
by
Rosa M. Woo-GarcÃa, Isaac RodrÃguez-Ibarra, Edith Osorio-de-la-Rosa, Cesia Guarneros-Aguilar, Felipe Caballero-Briones, Ricardo AgustÃn-Serrano, AgustÃn L. Herrera-May and Francisco López-Huerta
Link:
https://www.mdpi.com/2227-9717/10/3/492
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