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Journal: Processes, 2022
Volume: 10
Number: 492
492
Article: Automated Instrument for the Deposition of Thin Films Using Successive Ionic Layer Adsorption and Reaction
Authors: by Rosa M. Woo-García, Isaac Rodríguez-Ibarra, Edith Osorio-de-la-Rosa, Cesia Guarneros-Aguilar, Felipe Caballero-Briones, Ricardo Agustín-Serrano, Agustín L. Herrera-May and Francisco López-Huerta
Link: https://www.mdpi.com/2227-9717/10/3/492

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