Nanoporous Layer Integration for the Fabrication of ISFET and Related Transistor-Based Biosensors

Ravariu, Cristian; Manea, Elena; Pârvulescu, Cătălin; Dima, Gabriel

doi:10.3390/chemosensors13080316

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Nanoporous Layer Integration for the Fabrication of ISFET and Related Transistor-Based Biosensors

¹

Micro-Nano and Bio-Electronic Devices Simulation-Modeling Laboratory, Department of Electronic Devices Circuits and Architectures, Universitatea Naţională de Stiinţă şi Tehnologie Politehnica Bucureşti, str. Splaiul Independentei nr. 313, 060042 Bucharest, Romania

²

National Institute for Research and Development in Microtechnologies, Str. Erou Iancu Nicolae, nr. 126A, 077190 Voluntari, Ilfov, Romania

^*

Author to whom correspondence should be addressed.

Chemosensors 2025, 13(8), 316; https://doi.org/10.3390/chemosensors13080316

Submission received: 10 July 2025 / Revised: 7 August 2025 / Accepted: 13 August 2025 / Published: 20 August 2025

(This article belongs to the Special Issue Feature Review Papers in Chemical/Bio-Sensors and Analytical Chemistry in 2025)

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Abstract

More and more chemosensors and biosensors are turning to electronic transistors, as they are ideal transducers, precise in current response, miniaturized in size and capable of providing sub-picomolar detection limits. Among these devices, ISFET transistors—Ion-Sensitive Field-Effect Transistors—have the capacity of integrating ion-sensitive layers together with field effect transistors of ultimate generations. Recent studies have indicated that nanoporous materials deposited or grown within the transistor gate space offer a dual advantage—a favorable environment for an optimal capture of liquid state receptors through capillary effects, but also of direct anchoring of these nanoporous structures on a Si wafer. This article aims to review the constructive evolutions of ISFET transistors, along with some newer nanowire devices, as well as their co-integration techniques with nanoporous materials, which are beneficial in the optimization of many chemosensors but of enzymatic biosensors in particular.

Keywords: nanoporous layers; chemosensors; ISFET; silicon nano-wires; sensitive film

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MDPI and ACS Style

Ravariu, C.; Manea, E.; Pârvulescu, C.; Dima, G. Nanoporous Layer Integration for the Fabrication of ISFET and Related Transistor-Based Biosensors. Chemosensors 2025, 13, 316. https://doi.org/10.3390/chemosensors13080316

AMA Style

Ravariu C, Manea E, Pârvulescu C, Dima G. Nanoporous Layer Integration for the Fabrication of ISFET and Related Transistor-Based Biosensors. Chemosensors. 2025; 13(8):316. https://doi.org/10.3390/chemosensors13080316

Chicago/Turabian Style

Ravariu, Cristian, Elena Manea, Cătălin Pârvulescu, and Gabriel Dima. 2025. "Nanoporous Layer Integration for the Fabrication of ISFET and Related Transistor-Based Biosensors" Chemosensors 13, no. 8: 316. https://doi.org/10.3390/chemosensors13080316

APA Style

Ravariu, C., Manea, E., Pârvulescu, C., & Dima, G. (2025). Nanoporous Layer Integration for the Fabrication of ISFET and Related Transistor-Based Biosensors. Chemosensors, 13(8), 316. https://doi.org/10.3390/chemosensors13080316

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Nanoporous Layer Integration for the Fabrication of ISFET and Related Transistor-Based Biosensors

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