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Journal: Atoms, 2022
Volume: 10
Number: 147
Article:
Time-Resolved Analysis of the Electron Temperature in RF Magnetron Discharges with a Pulsed Gas Injection
Authors:
by
Thibault Sadek, Pierre Vinchon, Antoine Durocher-Jean, Guillaume Carnide, Myrtil L. Kahn, Richard Clergereaux and Luc Stafford
Link:
https://www.mdpi.com/2218-2004/10/4/147
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