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Journal: Electronics, 2025
Volume: 14
Number: 4751

Article: Physics-Based Simulation of Master Template Fabrication: Integrated Modeling of Resist Coating, Electron Beam Lithography, and Reactive Ion Etching
Authors: by Jean Chien, Lily Chuang and Eric Lee
Link: https://www.mdpi.com/2079-9292/14/23/4751

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