Multivariable Model Predictive Control of Cleanroom Pressure Cascades
Abstract
1. Introduction
- A conceptual approach to the multivariable nature of the problem and the application of known control theories to the specific CRPC domain, which has generally not been addressed before. This holistic conceptualization results in formalized steps for system identification, controller design, and tuning. As a result, those steps are replicable and can be used in a similar environment.
- System integration architecture, proving and presenting how conceptualization can be applied to a real and existing PLC and drive BMS systems in factories, with the help of additional computer systems on top of it.
- Controller architecture that introduces the MPC for a particular room but that also embraces the interdependencies between rooms, reflected through PID-driven duct pressure control. This is achieved by incorporating duct control in the measured disturbances. In this way, the architecture represents a method to cover the whole cascade of multiple rooms with one pair of fans.
- The discovery that one model of the system is suitable, not only in the vicinity of the identified operating point. On the contrary, it is appropriate for a wider range as long as the constraints are adaptable and shifted together with the setpoint variations according to a pre-captured data set.
- An optimal scenario for proper system identification that suits the developed controller and its architecture. This scenario is derived as a response to the limitations imposed by the mechanical design and process physics.
- Results that prove the assumption that the multivariable approach to this process has an advantage in comparison to the distributed SISO PID approach.
2. Related Work
3. Control Design Methodology
3.1. Process Description
3.2. Process Physics and Justification of the Black-Box Approach
3.3. Full Cascade Process Flow Diagram
3.4. From the Complete System Model to the Single Cleanroom Transfer Matrix
3.5. Optimization Problem
3.5.1. Case 1—Single Operating Point
3.5.2. Case 2—Wider Range of Operating Points
3.6. Controller Architecture with MPC Solution
3.7. System Identification
3.7.1. Preconditions
- Room operating points (pressure and flow) are given upfront by the conceptual factory design, upon very strict technological demands and users’ requirements.
- Based on that, the system must be air-balanced, and the working points of all process parameters must reach their own set values. This is related to duct pressures, all room pressures and room flows, as well as the positions of the actuators related to them.
3.7.2. Non-Uniqueness of the Duct Pressure Setpoint—A New Degree of Freedom
- Dampers need to have an acceptable range of free movement for control purposes.
- At the same time, they need to be open as wide as possible to avoid unnecessary air friction and aerodynamic obstruction that could increase the energy consumption of the fans.
3.7.3. Constraint Determination
3.7.4. Steps and Sequence for Identification
4. Case Study
4.1. Facility
4.2. Basic Control System
4.3. High-Level Control and System Integration
4.4. Experiment Process
- Setting up the factory plant and air-balancing the system in automatic mode and reaching all necessary setpoints according to plant requirements. This is the starting point for the tests and modeling around the nominal operating points.
- Detecting constraints according to the scenario described in the methodological section—Section 3. Constraints are detected, firstly around the nominal setpoint (Case 1 of handling constraints, as per Section 3.5.1), and afterwards at various different operating points (Case 2 of handling constraints, as per Section 3.5.2) in a wider range.
- Performing thorough system identification in three steps:
- Proceeding with 2 × 2 identification using a pseudo-random generator to excite dampers’ control signals, two signals simultaneously, to capture the response over the tested time.
- Proceeding with 1 × 2 identification of the supply VSD-to-room signal and capturing the response.
- Proceeding with 1 × 2 identification of the exhaust VSD-to-room signal and capturing the response.
- Composing the model using system identification tools, linearly combining previous results from Equation (8) into Equation (6). Applying the model to the MPC function, including disturbances from VSDs.
- Tuning the MPC parameters by trial-and-error and experimentation.
- Testing the MPC-isolated pressure control vs. PID-isolated pressure control by using a pseudo-random setpoint generator. Other quantities are fixed at this point (flow and both VSDs).
- Testing MPC 2 × 2 pressure and flow control in parallel vs. two independent PID SISO controls by using a pseudo-random 2D setpoint generator with fixed VSDs.
- Testing MPC 2 × 4 response to VSD disturbance vs. two independent PID SISO controls for pressure and flow by using pseudo-random disturbances as variations added to fixed VSD control inputs.
4.4.1. Stage 1—System Balancing and Mechanical Limitations
- We observe the whole HVAC system for the 17 cleanrooms in the cascade with a pair of VSD fans. All the quantities of the system are initially controlled by PID controllers from the PLC software (Siemens PXC100, XWorks 5), whose tuning quality is suboptimal but still responsive enough to reach a stable state in the absence of disturbances.
- Upon being started and put into automatic mode, the ventilation system is isolated from external disturbances and is left to reach a steady state. This means that referenced duct pressure is achieved and stabilized, as well as the whole collection of the cleanroom parameters for all the particular pressures and flows.
- After reaching a steady state, both supply and exhaust fans are frozen using manual control at captured operating points. The other cleanrooms, except for the tested one, are kept in automatic PID-driven mode.
- The starting point for this experiment is the precisely designed operation point for the room under test—30 Pa and 1250 m3/h plant requirements for the selected cleanroom.
4.4.2. Stage 2—Constraint Determination
- Constraint detection is initiated by searching for the throttling range for both the supply and exhaust dampers. The limitations that we do not want to breach are a pressure sensor range of 0 to 100 Pa and flow measurement between 0 and 1450 m3/h (0.402 m3/s). The throttling range is detected by easily changing the position of the dampers with a manual signal until the value near the saturation limit is reached. The constraints in the vicinity of the nominal operating point are supply—55–65%, exhaust—45–62%.
- For the variable constraints’ purposes described in Section 3.5.2, we performed the same set of experiments in nine distinctive operative points, three by each dimension (pressure, flow), and formed the following lookup table, Table 1.
4.4.3. Stage 3—System Identification Data
- Supply and exhaust dampers’ position signals are excited by random step signals within their corresponding throttling ranges. The time period for each impulse is 60 s, but the excitation shift between them is 30 s. This means that every 30 s, another actuator is excited in alternating order: sup-30s-exh-30s-sup-30s-exh-30s and so forth. Room pressure and flow quantities are recorded as the outputs.
- Supply fan speed was excited by a pseudo-random step sequence in the range of 80–90%, for gaining the corresponding linear model parts. We recorded the response from the supply VSD control signal to the cleanroom parameters in the role of the first measured disturbance. Experimental data are presented in Table 3 and recordings are presented in Figure 14.
- We repeated the same principle for the exhaust side. The exhaust fan speed was excited by a pseudo-random sequence in the range of 70–90% for gaining the final linear model parts. Similarly to the previous step, we were supposed to capture the response from the exhaust VSD to cleanroom pressure and flow in the role of the second measured disturbance. Experimental data are presented in Table 4, recordings are presented in Figure 15.
4.4.4. Stage 4—The Model
4.4.5. Stage 5—MPC Tuning
- Apply the scaling factor by using the range of the data set for two inputs and two outputs: supply and exhaust movement range, pressure and flow effective range.
- Set the initial sample time to 1 s, the prediction horizon to 15 samples, and the control horizon to two samples.
- Suppress the harsh oscillations and overshoots by substantially penalizing the input rate of change in gradual trial-and-error steps.
- Create stable and overdamped control by increasing the weights for both outputs, in circles.
- Gradually decrease the weights for the pressure output and for the exhaust damper input rate of change, leaving the supply flow weights fixed with regard to the above-described philosophy in order to relax the suppressed response.
- If necessary, decrease the damper input rate of change.
- By trial end error, repeat Steps 3–6 until an acceptable response is achieved.
- Repeat the experiment by changing the sample time and both horizons from Step 2 and make enough iterations of 3–6 until a proper result is achieved: overshoot limits are 5 Pa for pressure, and stabilization time is within 5 s.
4.4.6. Stage 6—MPC vs. PID 1 × 1 Response to Reference Tracking, Pressure Only
4.4.7. Stage 7—MPC vs. PID 2 × 2 Response to Ref. Tracking, Pressure, and Flow
4.4.8. Stage 8—MPC 2 × 2 and 2 × 4 vs. PID 2 × 2, Response to Disturbances, Pressure and Flow to VSD Signals Response
4.5. Discussion of the Results
- For each control strategy regarding responses to step changes, the periods between the instances of reference step changes were identified, and the responses of the controlled variables dP and Fl within the identified period were treated as the results of separate experiments.
- For each experiment:
- ○
- Rise-time (interval between reaching 10% and 90% of final response) and overshoot were calculated for each variable’s response to its own reference change as the performance indices for separate control loops.
- ○
- Integral-square error was calculated for each variable’s response to reference change in the other controlled variable, as a quantifier of (undesired) inter-loop coupling.
- For each control strategy, performance indices obtained in experiments were averaged and presented in the table.Note: Since the intensity of reference step changes varied between experiments, the integral-square errors of the coupling obtained in each experiment were pondered according to a relative reference step change intensity (absolute intensity divided by the total span of applied reference step changes in all experiments conducted for a control strategy) and then averaged.
5. Discussion and Conclusions
5.1. Discussion on the Chosen Architecture, Potential for Other Control Solutions
5.2. Discussion on Stability of the MPC Controller in the Cleanroom Environment
- The accuracy of the LTI model;
- The inclusion of a terminal cost in the optimization problem that penalizes asymptotic steady-state deviation;
- Careful selection of the constraints.
5.3. Conclusions
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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5 Pa | 20 Pa | 35 Pa | |
---|---|---|---|
400 m3/h | [19, 38] [17, 29] | [11, 30] [11, 23] | [3, 20] [5, 14] |
800 m3/h | [34, 55] [33, 54] | [31, 52] [24, 37] | [29, 50] [19, 31] |
1200 m3/h | [51, 71] [62, 77] | [49, 70] [53, 64] | [48, 68] [48, 59] |
Parameter | Description | Value or Range |
---|---|---|
[us ue] | Excitation: 2D signal, supply and exhaust damper position signals Form: step impulses of pseudo-random amplitude, 2D | [57–64%; 62–67%] |
Texp | Total experiment duration (overall sampling time) | 35 min |
Ti | Impulse duration per dedicated actuator signal | 25 s |
Tsh | Impulse shift between two excitation signal changes | 12.5 s |
Tq | Discretization time | 0.5 s |
[dP Fl] | Output: room pressure, supply air flow | trend |
Parameter | Description | Value |
---|---|---|
uds | Excitation: 1D pseudo-random signal, supply AHU fan speed control signal Form: step impulses of pseudo-random amplitude | 85–97% |
Texp | Total experiment duration (overall sampling time) | 6 min |
Ti | Impulse duration | 12.5 s |
Tq | Discretization time | 0.5 s |
[dP Fl] | Output: room pressure, supply air flow | trend |
Parameter | Description | Value |
---|---|---|
ude | Excitation: 1D pseudo-random signal, exhaust AHU fan speed control signal Form: step impulses of pseudo-random amplitude | 85–95% |
Texp | Total experiment duration (overall sampling time) | 6 min |
Ti | Impulse duration | 12.5 s |
Tq | Discretization time | 0.5 s |
[dP Fl] | Output: room pressure, supply air flow | trend |
Parameter | Description | Values |
---|---|---|
[p11, p22] | du/dt rate weights | [1.6 1] |
[q11, q22] | u weights (control variables) | [0.1 0.3] |
[r11, r22] | y weights (manipulated variables) | [0.54 1] |
Ts | MPC sample time | 1 s |
Tp | Prediction horizon | 15 s |
Tc | Control horizon | 2 s |
Parameter | Description | Value |
---|---|---|
dP setpoint | Pressure setpoint range, 1D pseudo-random signal Form: step impulses of pseudo-random amplitude | 8 Pa–55 Pa |
Texp [MPC; PID] | Duration of the experiment, overall sampling time | [15 min; 35 min] |
Ti | Impulse duration | 30 s |
Tq | Data acquisition sample time | 0.5 s |
dP | 1D output signal—room pressure | trend |
Parameter | Description | Value |
---|---|---|
[dP setpoint; Fl setpoint] | Pressure reference, flow reference, 2D pseudo-random signal Form: step impulses of pseudo-random amplitude | [8 Pa–50 Pa; 900 m3/h–1300 m3/h] |
Texp | Duration of the experiment, overall sampling time | 20 min |
Ti | Impulse duration | 60 s |
Tsh | Impulse shift between the dP setpoint and the Fl setpoint | 30 s |
Tq | Data acquisition sample time | 0.5 s |
[dP Fl] | Output: room pressure, supply air flow | trend |
Parameter | Description | Value |
---|---|---|
[uds; ude] | Input VSD disturbances, 2D pseudo-random signal, supply fan speed, and exhaust fan speed Form: step impulses of pseudo-random amplitude | [80–95%; 80–95%] |
Texp [MPC; PID] | Duration of the experiment, overall sampling time | [20 min; 12 min] |
Ti | Impulse duration | 90 s |
Tsh | Impulse shift between the VSD supply and the VSD exhaust signal | 45 s |
Tq | Data acquisition sample time | 0.5 s |
[dP Fl] | Output: room pressure, supply air flow | trend |
Avg. Rise Time dP [s] | Avg. Overshoot dP [%] | Integral Square Error dP | Avg. Rise Time Fl [s] | Avg. Overshoot Fl [%] | Integral Square Error Fl | |
---|---|---|---|---|---|---|
MPC 1 × 1 pressure reference change | 7.72 | 13.42 | N/A | N/A | N/A | 964.63 |
PID 1 × SISO pressure reference change | 14.23 | 2.28 | N/A | N/A | N/A | 1628.6 |
MPC 2 × 2 pressure and flow reference change | 9.02 | 18.55 | 55.25 | 8.65 | 18.57 | 1304.9 |
PID 2 × SISO pressure and flow reference change | 13.97 | 8.38 | 2230.7 | 19.53 | 7.76 | 3086.0 |
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Jeremić, B.M.; Rakić, A.Ž. Multivariable Model Predictive Control of Cleanroom Pressure Cascades. Electronics 2025, 14, 3296. https://doi.org/10.3390/electronics14163296
Jeremić BM, Rakić AŽ. Multivariable Model Predictive Control of Cleanroom Pressure Cascades. Electronics. 2025; 14(16):3296. https://doi.org/10.3390/electronics14163296
Chicago/Turabian StyleJeremić, Branislav M., and Aleksandar Ž. Rakić. 2025. "Multivariable Model Predictive Control of Cleanroom Pressure Cascades" Electronics 14, no. 16: 3296. https://doi.org/10.3390/electronics14163296
APA StyleJeremić, B. M., & Rakić, A. Ž. (2025). Multivariable Model Predictive Control of Cleanroom Pressure Cascades. Electronics, 14(16), 3296. https://doi.org/10.3390/electronics14163296