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Journal: Electronics, 2024
Volume: 13
Number: 4471

Article: Utilization of Machine Learning and Explainable Artificial Intelligence (XAI) for Fault Prediction and Diagnosis in Wafer Transfer Robot
Authors: by Jeong Eun Jeon, Sang Jeen Hong and Seung-Soo Han
Link: https://www.mdpi.com/2079-9292/13/22/4471

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