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Journal: Electronics, 2022
Volume: 11
Number: 2915
Article:
Simulation and Optimization of Piezoelectric Micromachined Ultrasonic Transducer Unit Based on AlN
Authors:
by
Xin Su, Xincheng Ren, Haoji Wan, Xingfang Jiang and Xianyun Liu
Link:
https://www.mdpi.com/2079-9292/11/18/2915
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