Fibers 2016, 4(3), 24; https://doi.org/10.3390/fib4030024
Development of Touch Probing System Using a Fiber Stylus
1
Department of Mechanical Systems Engineering, Faculty of Environmental Engineering, The University of Kitakyushu, 1-1 Hibikino, Wakamatsu-ku, Kitakyushu, Fukuoka 808-0135, Japan
2
Department of Mechanical Engineering, Faculty of Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
*
Author to whom correspondence should be addressed.
Academic Editor: Torsten Frosch
Received: 24 May 2016 / Accepted: 23 July 2016 / Published: 11 August 2016
(This article belongs to the Special Issue Optical Fiber Sensors)
Abstract
This paper presents a system that can be used for micro-hole measurement; the system comprises an optical fiber stylus that is 5 µm in diameter. The stylus deflects when it comes into contact with the measured surface; this deflection is measured optically. In this study, the design parameters of the optical system are determined using a ray-tracing method, and a prototype of the probing system is fabricated to verify ray-tracing simulation results; furthermore, the performance of the system is evaluated experimentally. The results show that the design parameters of this system can be determined using ray-tracing; the resolution of the measurement system using this shaft was approximately 3 nm, and the practicality of this system was confirmed by measuring the shape of a micro-hole 100 µm in diameter and 475 µm in depth. View Full-Text
Graphical abstract
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MDPI and ACS Style
Murakami, H.; Katsuki, A.; Sajima, T. Development of Touch Probing System Using a Fiber Stylus. Fibers 2016, 4, 24.
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