Next Article in Journal
Surface Functionalization of Activated Carbon with Phosphonium Ionic Liquid for CO2 Adsorption
Previous Article in Journal
Tribological Performance of PVD Film Systems Against Plastic Counterparts for Adhesion-Reducing Application in Injection Molds
Open AccessArticle

Influence of the Growth Ambience on the Localized Phase Separation and Electrical Conductivity in SrRuO3 Oxide Films

Organic Electronics Research Center and Department of Electronic Engineering, Ming Chi University of Technology, New Taipei City 24301, Taiwan
Coatings 2019, 9(9), 589; https://doi.org/10.3390/coatings9090589
Received: 18 August 2019 / Revised: 13 September 2019 / Accepted: 16 September 2019 / Published: 18 September 2019
Perovskite SrRuO3 (SRO) epitaxial thin films grown on SrTiO3 (STO) (001) have been synthesized using pulsed laser deposition (PLD) under a series of oxygen pressures. High quality and conductive SRO thin films on STO have been achieved at 10−1 Torr oxygen pressure with the epitaxial relation of (110)<001>SrRuO3//(001)<010>SrTiO3. The lattice parameters of the thin films exhibit huge expansion by reducing the ambience (~10−7 Torr) during deposition, and the resistance increases by about two orders higher as compared with the low oxide pressure ones. The rise of resistivity can be ascribed to not only the deficiency of Ru elements but also the phase transformation inside SRO thin films. The correlation of growth ambience on the structural transition and corresponding resistivity of epitaxial oxide thin films have been explicitly investigated. View Full-Text
Keywords: pulsed laser deposition; functional oxide; phase transformation; electrical conductivity pulsed laser deposition; functional oxide; phase transformation; electrical conductivity
Show Figures

Graphical abstract

MDPI and ACS Style

Cheng, H.-M. Influence of the Growth Ambience on the Localized Phase Separation and Electrical Conductivity in SrRuO3 Oxide Films. Coatings 2019, 9, 589.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop