Design and Preparation of a 6-Channel Fan-Shaped Integrated Narrow-Band Filter in the Mid-Infrared Band
Abstract
:1. Introduction
2. Basic Principle and Film Design
3. Experiments
4. Results Discussion and Comparison
5. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Material | Base Pressure Vacuum (Pa) | Temperature (°C) | Evaporation Rate (nm/s) |
---|---|---|---|
Ge | 1.3 × 10−3 | 120 | 0.3 |
ZnS | 3 × 10−3 | 105 | 0.4 |
Y2O3 | 2 × 10−3 | 250 | 0.4 |
Channel | T1 | T2 | T3 | T4 | T5 | T6 |
---|---|---|---|---|---|---|
Peak position (nm) | 3670 | 3817 | 3962 | 4114 | 4260 | 4410 |
Transmittance (%) | 76.5 | 82.5 | 85.7 | 84.8 | 86.7 | 84.3 |
FWHM (nm) | 55.98 | 55.64 | 60.27 | 69.3 | 79.64 | 93.53 |
Film Number | Design Thickness (nm) | Test Thickness (nm) | Deviation (nm) |
---|---|---|---|
1 | 432.04 | 427 | −5.04 |
2 | 271.75 | 278 | −6.25 |
3 | 447.15 | 437 | 10.15 |
4 | 248.11 | 248 | 0.11 |
5 | 435.54 | 427 | 8.54 |
6 | 900 | 893 | 7 |
960 | 948 | 12 | |
1020 | 1010 | 10 | |
1080 | 1070 | 10 | |
1140 | 1120 | 20 | |
1200 | 1180 | 20 | |
7 | 308.11 | 466 | −157.89 |
8 | 356 | 218 | 138 |
9 | 390.06 | 397 | −6.94 |
10 | 238.65 | 238 | 0.65 |
Company Name | Peak Wavelength (nm) | Base Material | Filter Channel Characteristics | Positioning Accuracy (nm) | Peak Transmittance |
---|---|---|---|---|---|
Spectrogon | 3700 | Silicon | Single-channel | ±20 | 75% |
3860 | Sapphire | Single-channel | ±20 | 60% | |
4120 | Sapphire | Single-channel | ±20 | 70% | |
4270 | Sapphire | Single-channel | ±25 | 70% | |
4275 | Sapphire | Single-channel | ±15 | 70% | |
4515 | Sapphire | Single-channel | ±20 | 70% | |
HB-Optical | 2100 | – | Single-channel | ±10 | 75% |
2200 | – | Single-channel | ±10 | 75% | |
Alluxa | 1064 | Silicon | Single-channel | – | 85% |
In this work | 3675 | Silicon | 6 channels integration | ±10 | 76.5% |
3825 | ±10 | 82.5% | |||
3975 | ±10 | 85.7% | |||
4125 | ±10 | 84.8% | |||
4275 | ±10 | 86% | |||
4425 | ±10 | 84.3% |
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Duan, Y.; Cai, C.; Liang, H.; Jia, T.; Yin, S. Design and Preparation of a 6-Channel Fan-Shaped Integrated Narrow-Band Filter in the Mid-Infrared Band. Coatings 2019, 9, 567. https://doi.org/10.3390/coatings9090567
Duan Y, Cai C, Liang H, Jia T, Yin S. Design and Preparation of a 6-Channel Fan-Shaped Integrated Narrow-Band Filter in the Mid-Infrared Band. Coatings. 2019; 9(9):567. https://doi.org/10.3390/coatings9090567
Chicago/Turabian StyleDuan, Yingbu, Changlong Cai, Haifeng Liang, Tiantian Jia, and Shujing Yin. 2019. "Design and Preparation of a 6-Channel Fan-Shaped Integrated Narrow-Band Filter in the Mid-Infrared Band" Coatings 9, no. 9: 567. https://doi.org/10.3390/coatings9090567