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Journal: Coatings, 2019
Volume: 9
Number: 478

Article: Surface Morphology of Silicon Waveguide after Reactive Ion Etching (RIE)
Authors: by Yu Zheng, Piaopiao Gao, Lianqiong Jiang, Xiaochao Kai and Ji’an Duan
Link: https://www.mdpi.com/2079-6412/9/8/478

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