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Broadband High-Reflection Dielectric PVD Coating with Low Stress and High Adhesion on PMMA

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
Institute of Deep-sea Science and Engineering, Chinese Academy of Sciences, Sanya 572000, China
Authors to whom correspondence should be addressed.
Coatings 2019, 9(4), 237;
Received: 20 February 2019 / Revised: 4 April 2019 / Accepted: 4 April 2019 / Published: 7 April 2019
PDF [3764 KB, uploaded 7 April 2019]
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Polymethyl methacrylate (PMMA) is an attractive optical plastic that is widely used in augmented reality, virtual reality devices, display, wearable devices, portable optical equipment, and lightweight optics. Thin film prepared by physical vapor deposition (PVD) is the primary choice of coating on PMMA. However, it faces problems with coating adhesion and stress. In this paper, we analyze the problems existing in the current PMMA high-reflection (HR) coating in detail and propose a way to effectively solve issues with bonding force and stress. Based on the current research background, the bonding force was enhanced by introducing a special hard coating as the connection layer between the dielectric film and the substrate. After comparing the stresses of different coating materials and material combinations, the optimal combination of Nb2O5 and SiO2 was determined, and the requirements were successfully prepared. An HR coating that satisfies requirements, with low stress and excellent environmental adaptability, was successfully prepared. Based on this, a broadband HR coating from 750 to 1550 nm was formed on the surface of PMMA by adjusting the partial pressure of oxygen. View Full-Text
Keywords: PMMA; high-reflection coating; coating stress; coating adhesion PMMA; high-reflection coating; coating stress; coating adhesion

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Li, Z.; Li, Q.; Quan, X.; Zhang, X.; Song, C.; Yang, H.; Wang, X.; Gao, J. Broadband High-Reflection Dielectric PVD Coating with Low Stress and High Adhesion on PMMA. Coatings 2019, 9, 237.

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