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Journal: Coatings, 2019
Volume: 9
Number: 5
Article:
Influence of the Geometric Parameters on the Deposition Mode in Spatial Atomic Layer Deposition: A Novel Approach to Area-Selective Deposition
Authors:
by
César Masse de la Huerta, Viet Huong Nguyen, Jean-Marc Dedulle, Daniel Bellet, Carmen Jiménez and David Muñoz-Rojas
Link:
https://www.mdpi.com/2079-6412/9/1/5
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