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Journal: Coatings, 2019
Volume: 9
Number: 17

Article: Control over the Phase Formation in Metastable Transition Metal Nitride Thin Films by Tuning the Al+ Subplantation Depth
Authors: by Grzegorz Greczynski, Stanislav Mráz, Marcus Hans, Jun Lu, Lars Hultman and Jochen M. Schneider
Link: https://www.mdpi.com/2079-6412/9/1/17

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