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Journal: Coatings, 2018
Volume: 8
Number: 150
150
Article: Effects of Annealing on Residual Stress in Ta₂O₅ Films Deposited by Dual Ion Beam Sputtering
Authors: by Qipeng Lv, Mingliang Huang, Shaoqian Zhang, Songwen Deng, Faquan Gong, Feng Wang, Yanwei Pan, Gang Li and Yuqi Jin
Link: https://www.mdpi.com/2079-6412/8/4/150

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