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Journal: Coatings, 2017
Volume: 7
Number: 189

Article: Ta–Zr–N Thin Films Fabricated through HIPIMS/RFMS Co-Sputtering
Authors: by Li-Chun Chang, Ching-Yen Chang and Ya-Wen You
Link: https://www.mdpi.com/2079-6412/7/11/189

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