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Journal: Coatings, 2024
Volume: 14
Number: 673
Article:
Influence of Flow Rates and Flow Times of Plasma-Enhanced Atomic Layer Deposition Purge Gas on TiN Thin Film Properties
Authors:
by
Ju Eun Kang, Surin An and Sang Jeen Hong
Link:
https://www.mdpi.com/2079-6412/14/6/673
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