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Coatings2024, 14(6), 673;https://doi.org/10.3390/coatings14060673

Journal: CoatingsVolume: 14Number: 673

Article: Influence of Flow Rates and Flow Times of Plasma-Enhanced Atomic Layer Deposition Purge Gas on TiN Thin Film Properties

Authors:
Ju Eun Kang¹,
Surin An² and
Sang Jeen Hong^1,*

Link: https://www.mdpi.com/2079-6412/14/6/673

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