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Journal: Coatings, 2024
Volume: 14
Number: 673

Article: Influence of Flow Rates and Flow Times of Plasma-Enhanced Atomic Layer Deposition Purge Gas on TiN Thin Film Properties
Authors: by Ju Eun Kang, Surin An and Sang Jeen Hong
Link: https://www.mdpi.com/2079-6412/14/6/673

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