The Study of the Etching Resistance of YOF Coating Deposited by Atmospheric Plasma Spraying in HBr/O₂ Plasma

Round 1

Reviewer 1 Report

Comments and Suggestions for Authors

Reviewer:

The article is undoubtedly interesting and relevant, but needs minor revision needed

1. Subparagraphs 2 of Section 2.1 and 2.2 should be swapped, since paragraph 2.2 describes the entire research methodology and paragraph 2.1 presents the research results.

2. In section 2, subsection 2.1, the authors write that particle size is important when assessing the fluidity of a material, but do not provide any evidence for this statement. A reference should be inserted to support this statement. Also, the sentence “Table 1 presents the average particle size and flowability characteristics of YOF 3%, YOF 6%, and YOF 9% powders” should be corrected, since the table presents the data on the size of the beads and their angle of repose.

3. In Figure 6, indicate which major is represented on the y-axis and in what units.

 

In general, the article is of interest to scholars in this field, relevant and new. After making minor changes according to my comments, it can be published in Molecules.

Author Response

Please see the attachment.

Author Response File: Author Response.pdf

Reviewer 2 Report

Comments and Suggestions for Authors

Dear authors, first of all, I appreciate the topic addressed, which is of interest for semiconductor technologies. However, for a good understanding and an adequate substantiation of your research, you need to make additions and modifications to the article. You will find attached the version of the article with the annotations that we considered necessary. All the best!

Comments for author File: Comments.pdf

Author Response

Please see the attachment.

Author Response File: Author Response.pdf

Round 2

Reviewer 2 Report

Comments and Suggestions for Authors

Dear authors, I have read your answers and I appreciate their correctness. For this reason, please include all these explanations in the text of the article.

Author Response

Please see the attachment.

Author Response File: Author Response.pdf