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Particle-in-Cell Simulations for the Improvement of the Target Erosion Uniformity by the Permanent Magnet Configuration of DC Magnetron Sputtering Systems
 
 

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Journal: Coatings, 2023
Volume: 13
Number: 955

Article: Influence of Co-Content on the Optical and Structural Properties of TiOx Thin Films Prepared by Gas Impulse Magnetron Sputtering
Authors: by Patrycja Pokora, Damian Wojcieszak, Piotr Mazur, Małgorzata Kalisz and Malwina Sikora
Link: https://www.mdpi.com/2079-6412/13/5/955

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