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Journal: Coatings, 2023
Volume: 13
Number: 310
310
Article: Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture
Authors: by Evgeniya Ermakova, Alexey Kolodin, Anastasiya Fedorenko, Irina Yushina, Vladimir Shayapov, Eugene Maksimovskiy and Marina Kosinova
Link: https://www.mdpi.com/2079-6412/13/2/310

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