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Journal: Coatings, 2023
Volume: 13
Number: 2081

Article: Nanomaterials and Equipment for Chemical–Mechanical Polishing of Single-Crystal Sapphire Wafers
Authors: by Shaoping Li, Jieni Fu, Zhaobo He, Yue Luo and Shuilin Wu
Link: https://www.mdpi.com/2079-6412/13/12/2081

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