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Coatings2023, 13(12), 2081;https://doi.org/10.3390/coatings13122081

Journal: CoatingsVolume: 13Number: 2081

Article: Nanomaterials and Equipment for Chemical–Mechanical Polishing of Single-Crystal Sapphire Wafers

Authors:
Shaoping Li^1,†,
Jieni Fu^2,† and
Zhaobo He^1,*
et al.

Link: https://www.mdpi.com/2079-6412/13/12/2081

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