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Journal: Coatings, 2023
Volume: 13
Number: 1942
Article:
Parylene-AlOx Stacks for Improved 3D Encapsulation Solutions
Authors:
by
Sébastien Buchwalder, Florian Bourgeois, Juan J. Diaz Leon, Andreas Hogg and Jürgen Burger
Link:
https://www.mdpi.com/2079-6412/13/11/1942
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